发明名称 WORK POSITION CORRECTING APPARATUS AND CASSETTE TRANSPORTING APPARATUS
摘要 PROBLEM TO BE SOLVED: To obtain a work position correcting apparatus which can prevent damage to work when correcting the displacement of a thin plate work. SOLUTION: A plurality of porous materials 7 are arranged on the work supporting surface 4 of a supporting body 2 and compressed air is spouted out from the porous materials 7. Accordingly, a work W extended over the work supporting surface 4 is supported by compressed gas on a non-contact basis. While non-contact supporting is maintained, the displacement of the work is corrected by position correcting members 3 arranged in the periphery. By this structure, since the displacement of work W is corrected under a non-contact state with the work supporting surface 4, the work W and the work supporting surface 4 are not rubbed with each other when correcting the displacement. Therefore, the work is not damaged. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004241465(A) 申请公布日期 2004.08.26
申请号 JP20030026847 申请日期 2003.02.04
申请人 CKD CORP 发明人 MATSUO KENJI;ITO MASA
分类号 B65G49/07;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65G49/07
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