发明名称 Semiconductor wafer having an upper side, semiconductor chip positions with integrated circuits for first chips, central and edge regions and an equalizing layer useful in semiconductor technology
摘要 Semiconductor wafer having an upper side, semiconductor chip positions with integrated circuits for first chips (4), central region (5) and an edge region (7) with their contact surfaces (6) and (8) respectively, connected via conduction paths (9)(sic), second chips (10), with their contact surfaces (11), located on the central regions (5) of chips (4), and an equalizing layer (12) on the upper side with second chips (10) embedded in it. Independent claims are included for: (1) Nutzen (sic), (2) an electronic component with first and second chips, (3) a device with a polyimide equalizing layer, (4) a process for preparation of the wafer, (5) a process for preparation of the Nutzen (sic), (6) a process for preparation of the electronic component.
申请公布号 DE10320579(A1) 申请公布日期 2004.08.26
申请号 DE2003120579 申请日期 2003.05.07
申请人 INFINEON TECHNOLOGIES AG 发明人 GOLLER, BERND
分类号 H01L21/56;H01L21/98;H01L23/16;H01L23/31;H01L25/065 主分类号 H01L21/56
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