METHOD AND DEVICE FOR FORMING OXIDE FILM,申请号KR20047006997-传众专利搜索

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发明名称	METHOD AND DEVICE FOR FORMING OXIDE FILM
摘要
申请公布号	KR20040074984(A)	申请公布日期	2004.08.26
申请号	KR20047006997	申请日期	2002.10.31
申请人		发明人
分类号	G03G9/08;H01L21/31;C23C8/12;G03G9/09;G03G9/097;H01L21/316;H01L21/336;H01L21/8247;H01L27/115;H01L29/78;H01L29/786;H01L29/788;H01L29/792	主分类号	G03G9/08
代理机构		代理人
主权项
地址

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