| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To eliminate variations of an electrode pitch due to different contraction at a central portion and a peripheral portion of a raw material sheet where a plurality of operation units of a piezoelectric actuator are actuated when the large-sized raw material sheet is calcined. <P>SOLUTION: There are provided a process of forming a laminate by laminating the large-sized raw member sheets 210, 220, and 230 in each of which a plurality of regions of the operation units of the piezoelectric actuator 20 are disposed in a matrix, a process of forming a cutout 50 penetrating the laminate in the direction of the thickness of the same in a flat plate surface of the laminate at a part of boundaries among the regions constituting the operation unit, a process of pressing and integrating the laminate over the entire surface of the same, a process of calcining the laminate thereafter, and a process of cutting off the piezoelectric actuator from the calcined laminate. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
