| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape inspection method for performing shape inspection of a target object at high speed with high precision by simple structure with a small number of illuminations as well, without relying on the surface reflection property of the object using the whole reflected light effectively, and to provide a shape inspection device using the method. SOLUTION: In the shape inspection method, the target object is illuminated from two or more directions by the use of illuminating means, and images of the target object illuminated from the different directions are photographed, and from the directions of illumination and each luminance of pixels of the same coordinates in the obtained images the surface gradient of the target object is measured. In the method, surface reflection parameters of the target object are estimated, using the images and a non-defective article shape model. The surface gradient of the target object is estimated by using the images and the estimated values of the surface reflection parameters, and the estimated value of the surface gradient and the surface gradient of the non-defective article shape model are compared, to inspect whether or not the shape of the target object is good. COPYRIGHT: (C)2004,JPO&NCIPI
|
