| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating method and a heating device by which the temperature of the object to be heated can rapidly be raised to a set temperature while preventing the damage to a heater function. SOLUTION: The target temperature for a plurality of heating regions 12a to 12d is set so as to be stepwise raised, and each time when the temperature in the heating region where the rise of the temperature is slowest, reaches each level of the target temperatures, the voltage to be applied to a heater 24 is stepwise raised. At this time, the rise of the voltage in the following stage is applied only when a prescribed time is elapsed after the rise of the voltage in the prestage. Thus, the whole of the object 12 to be heated can swiftly and securely be heated up, and the damage or the like caused by rapid heating of the heater 24 can be prevented. COPYRIGHT: (C)2004,JPO&NCIPI
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