发明名称 Layer transfer method
摘要 The invention relates to a method of removing a peripheral zone of adhesive while using a layer of adhesive in the process of assembling and transferring a layer of material from a source substrate to a support substrate. The method is remarkable in that it includes bonding the two substrates together by means of a curable adhesive so that an excess of adhesive is present. This assures proper bonding and provides a peripheral zone of adhesive outside of the joined substrates. Only that portion of adhesive is cured which is present in a connection zone between the substrates, and the peripheral zone of non-cured adhesive is removed prior to detaching the transferable layer. The invention is applicable to fabricating a composite substrate in the fields of electronics, opto-electronics, or optics.
申请公布号 US2004166649(A1) 申请公布日期 2004.08.26
申请号 US20040753172 申请日期 2004.01.06
申请人 SOITEC & CEA 发明人 BRESSOT SEVERINE;RAYSSAC OLIVIER;ASPAR BERNARD
分类号 B81C1/00;C09J5/00;H01L21/762;(IPC1-7):H01L21/30;H01L21/46 主分类号 B81C1/00
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