Method of transferring a substantially disk-shaped workpiece and apparatus for carrying out such a transfer

摘要

First (2) and second (4) workpiece carriers fasten on first (6) and second (7) holding devices with the help of third (8) and fourth (9) double-sided foil adhesive devices. The adhesive force of the third adhesive device between the first workpiece carrier and the first holding device as well as the adhesive force of the fourth adhesive device between the second workpiece carrier and the second holding are both distinctly greater than the adhesive force of a first adhesive device (3) and a second adhesive device (5). All this ensures that the first adhesive device is separated to start with during a separation process to separate the workpiece from the workpiece carrier. An Independent claim is also included for a device for carrying out the method of the present invention.