发明名称 |
MARKING CORRECTION METHOD FOR LASER MARKING SYSTEM |
摘要 |
PURPOSE: A marking correction method for a laser marking system is provided to correct a marking error by photographing a marking object and using a prestored marking error. CONSTITUTION: A plurality of observing chips are assigned to each vision camera(11). Each vision camera corresponds to coordinates of laser markers(12). The first symbol is marked on each chip or positions corresponding to each chip, the first symbol is observed by using the corresponding vision camera, and one point of the symbol is defined as a reference point(13). The first symbol and the reference point are observed by using the corresponding vision camera and the second symbol is marked by using the reference point(14). A comparative point of the second symbol is defined by observing the second symbol(15). Marking errors of each cell are detected by using a position of the comparative point(16,17).
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申请公布号 |
KR20040074324(A) |
申请公布日期 |
2004.08.25 |
申请号 |
KR20030009877 |
申请日期 |
2003.02.17 |
申请人 |
EO TECHNICS CO., LTD. |
发明人 |
BYUN, YEONG SIK;KIM, BYEONG HWAN;KIM, TAE JEONG;KWON, GU CHEOL;LEE, JEONG GU |
分类号 |
H01L23/544;(IPC1-7):H01L23/544 |
主分类号 |
H01L23/544 |
代理机构 |
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