发明名称 |
Multimode ion source with a hollow cathode sputter ion source-like structure with radial ion extracion. |
摘要 |
<p>Multi-mode metal ion source comprises a unit for producing a symmetrical magnetic mirror field in an air gap of an electromagnet, an electrode arrangement arranged in the region of the mirror field, two cooled anodes (2) arranged between cathodes (1), a hollow cylindrical cooled anti-cathode (6) arranged between the anodes, further sputtering electrodes (4), an extraction electrode (7), and a switching device. Preferably the unit for producing a magnetic mirror is structured so that the cross-section of the pole shoe producing the mirror field is rectangular to elliptical. The iron core of the unit for producing the magnetic mirror consists of a carbon core or two carbon cores forming a mirror. A dielectric is arranged between the pole shoes and the electrode arrangement.</p> |
申请公布号 |
EP1450389(A2) |
申请公布日期 |
2004.08.25 |
申请号 |
EP20040001306 |
申请日期 |
2004.01.22 |
申请人 |
GESELLSCHAFT FUER SCHWERIONENFORSCHUNG MBH |
发明人 |
MUELLER, MICHAEL, DR.;JANIK, JAN, PROF. ING. |
分类号 |
H01J27/04;H01J27/18;H01J27/20;H01J27/22;H01J37/08;H01J41/04;H01J41/10;(IPC1-7):H01J27/18 |
主分类号 |
H01J27/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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