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发明名称
ELECTROSTATIC CHUCK
摘要
申请公布号
KR20040074597(A)
申请公布日期
2004.08.25
申请号
KR20037016828
申请日期
2003.12.24
申请人
发明人
分类号
H01L21/68;H01L21/683;H02N13/00
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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