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发明名称
METHOD AND SYSTEM FOR DETERMINING A THICKNESS OF A LAYER
摘要
申请公布号
EP1448950(A1)
申请公布日期
2004.08.25
申请号
EP20020802427
申请日期
2002.10.03
申请人
MOTOROLA, INC.
发明人
FRISA, LARRY;MAUTZ, KARL
分类号
H01L21/66;(IPC1-7):G01B11/06
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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