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经营范围
发明名称
Imaging apparatus
摘要
申请公布号
EP1449032(A1)
申请公布日期
2004.08.25
申请号
EP20020790447
申请日期
2002.11.27
申请人
ASML NETHERLANDS B.V.
发明人
VAN DER MAST, KAREL, DIEDERICK;BLEEKER, ARNO, JAN
分类号
G01B11/00;G01B11/24;G03F7/20;H01L21/027;(IPC1-7):G03F7/20
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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