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发明名称
POSITIONING CONTROL
摘要
申请公布号
EP0500852(B2)
申请公布日期
2004.08.25
申请号
EP19910915289
申请日期
1991.08.31
申请人
LEICA MICROSYSTEMS WETZLAR GMBH
发明人
SCHALZ, KARL-JOSEF
分类号
G02B7/28;G02B7/08;G02B21/24;G02B21/26;G05D3/10;G05D3/12;H02P7/29;(IPC1-7):G05D3/10
主分类号
G02B7/28
代理机构
代理人
主权项
地址
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