| 摘要 |
Embodiments concern contacts for use in integrated circuits, and methods of their manufacture, which result in a reduced likelihood of shorting between unrelated portions of an overlying conductive layer across misaligned contacts. Embodiments of the method involve performing a first etching process to pattern the conductive layer, where the etching compound used in the first etching process is relatively selective to the conductive layer's materials. Embodiments of the method also involve performing a second, contact related etching process that removes a portion of any misaligned contacts that were exposed by the first etching process, where the etching compound used in the second etching process is selective to the contacts' materials. The embodiments of the method could be used to form vias and other interconnect structures as well. The modified contacts and vias are adapted for use in conjunction with memory cells and apparatus incorporating such memory cells, as well as other integrated circuits.
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