发明名称 |
Shield assembly for substrate processing chamber |
摘要 |
Disclosed is a shielding assembly for use within a substrate deposition processing chamber. The shielding assembly permits sputtering and evaporation processes to take place without the target material depositing upon the internal non-disposable surfaces of the chamber. The shielding assembly is of an improved construction which permits it to be uncoupled from an adapter plate without the need for removing the adapter plate from the deposition chamber.
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申请公布号 |
US6780294(B1) |
申请公布日期 |
2004.08.24 |
申请号 |
US20020223344 |
申请日期 |
2002.08.19 |
申请人 |
SET, TOSOH |
发明人 |
HIXSON ROBERT B.;GROSHONG GARY WILLIAM;JORDAN DAVID BRUCE;GONZALEZ JOSE LUIS |
分类号 |
B05C11/11;C23C14/34;C23C14/56;H01J37/32;(IPC1-7):C23C14/34 |
主分类号 |
B05C11/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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