发明名称 |
Method of manufacturing electron-emitting device, electron source and image-forming apparatus, and apparatus of manufacturing electron source |
摘要 |
A method of manufacturing an electron-emitting device includes a process for forming a pair of electric conductors spaced from each other on a substrate, and an activation process for forming a film of carbon or a carbon compound on at least one of the pair of electric conductors. The activation process is sequentially performed within plural containers having different atmospheres.
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申请公布号 |
US6780073(B2) |
申请公布日期 |
2004.08.24 |
申请号 |
US20020112720 |
申请日期 |
2002.04.02 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
TAMURA MIKI;OHNISHI TOSHIKAZU;JINDAI KAZUHIRO |
分类号 |
H01J9/02;(IPC1-7):H01J9/00;H01J9/44 |
主分类号 |
H01J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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