发明名称 Method of manufacturing piezoelectric actuator
摘要 In a method of manufacturing a piezoelectric actuator there are provided a piece of piezoelectric material having piezoelectric bodies, a first piece of material having vibrational bodies, a second piece of material having movable bodies, and a third piece of material having pressurizing members. The first, second and third pieces of materials are superimposed over the piece of piezoelectric material to form a multilayered structure having piezoelectric actuators. The multilayered structure is cut to separate each of the piezoelectric actuators from one another.
申请公布号 US6779238(B2) 申请公布日期 2004.08.24
申请号 US20010802615 申请日期 2001.03.09
申请人 SEIKO INSTRUMENTS INC. 发明人 SUZUKI MAKOTO;IINO AKIHIRO;KASUGA MASAO;KOROISHI KEITAROU
分类号 H01L41/09;H01L41/22;H02N2/00;(IPC1-7):H04R17/00 主分类号 H01L41/09
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