发明名称 |
Method and apparatus for cutting electrical wiring line on a substrate, and method and apparatus for manufacturing electronic device |
摘要 |
An apparatus for cutting an electrical wiring line includes a laser generator for generating a laser beam, an optical beam branching element for branching a laser beam generated by the laser generator into a plurality of branch beams, and a condenser element for condensing the branch beams branched by the optical beam branching element (the optical beam branching element can also serve as the condenser element). The condenser element may be a condenser lens which is separate from the optical beam branching element. The power and the focal depth of the branch beam may be adjusted. When the substrate has a transparency to the laser beam, the branch beam is directed to the electrical wiring line formed on the substrate from the opposite side to the surface having the electrical wiring line.
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申请公布号 |
US6781089(B2) |
申请公布日期 |
2004.08.24 |
申请号 |
US20020273422 |
申请日期 |
2002.10.17 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
UMETSU KAZUSHIGE;AMAKO JUN;HONDA KENICHI |
分类号 |
G02F1/1343;B23K26/00;B23K26/06;B23K26/067;B23K26/12;B23K101/36;G02F1/1345;G02F1/1362;H01L21/3205;H01L23/52;H01L51/50;H05B33/10;H05K3/02;H05K3/22;(IPC1-7):B23K26/38 |
主分类号 |
G02F1/1343 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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