发明名称 |
Fabry-Perot cavity manufactured with bulk micro-machining process applied on supporting substrate |
摘要 |
The present invention discloses an electro-optical device support on a substrate. The electro-optical device includes two face-to-face freestanding membranes each supported near a top surface on one of two bonded substrates for defining a resonant cavity between the two membranes. Each of the substrates having an entire bulk-portion opposite the cavity etched off as a bulk micro-machining opening extended from each of the membranes through a bottom surface of the substrates.
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申请公布号 |
US6781735(B2) |
申请公布日期 |
2004.08.24 |
申请号 |
US20020053328 |
申请日期 |
2002.01.16 |
申请人 |
HUANG LIJI;YAO YAHONG;HAN NAIQIAN;WANG GAOFENG |
发明人 |
HUANG LIJI;YAO YAHONG;HAN NAIQIAN;WANG GAOFENG |
分类号 |
B81B3/00;B81C3/00;G02B6/12;G02B6/122;G02B26/00;G02B26/02;(IPC1-7):G02F1/03;H01S3/08 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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