发明名称 Projection optical system
摘要 A projection optical system comprises a first lens group with positive power, a second lens group with negative power, a third lens group with positive power, a fourth lens group with negative power, and a fifth lens group with positive power. At least one of the first, second, and third lens group has an aspherical surface. A lens arrangement of one embodiment has a plurality of waists of lenses, with aspherical surface before and after a first waist.
申请公布号 US6781766(B2) 申请公布日期 2004.08.24
申请号 US20030337860 申请日期 2003.01.08
申请人 NIKON CORPORATION 发明人 TAKAHASHI TOMOWAKI
分类号 G02B13/24;G03F7/20;H01L21/027;(IPC1-7):G02B9/00;G02B9/60;G03B27/54 主分类号 G02B13/24
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