发明名称 TEMPERATURE COMPENSATION METHOD AND APPARATUS FOR WAVE METERS AND TUNABLE LASERS CONTROLLED THEREBY
摘要 Temperature compensation method and apparatus for wave meters and tunable lasers controlled thereby which avoids the necessity of maintaining a good vacuum in the wave meter housing and which provides the quick establishment of wavelength accuracy after laser turn on before temperature stability in the wave meter is reached. In accordance with the method, the wave meter housing (12) is filled preferably with one atmosphere of dry nitrogen, and the wave meter output is corrected for temperature effects by combining the uncorrected or raw wave meter output with an appropriate wave meter temperature dependent component (14) and an additional appropriate rate of change of wave meter temperature dependent component (16). The net result is the achievement of accuracy and stability in the wave meter output without use of an oven and before a steady state operating temperature is attained.
申请公布号 CA2198714(C) 申请公布日期 2004.08.24
申请号 CA19942198714 申请日期 1994.08.31
申请人 CYMER, INC. 发明人 SANDSTROM, RICHARD L.
分类号 G01J9/00;G01J;G01J9/02;H01S;H01S3/13;H01S5/0687;(IPC1-7):H01S3/13 主分类号 G01J9/00
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