发明名称 Optical lithography
摘要 In an optical lithography using a mask pattern, or producing a large quantity of three-dimensional articles rapidly with high precision, a predetermined mask pattern is drawn directly on the surface of a resin composition for optical lithography, and the mask pattern is irradiated with light, thereby irradiating the surface of the resin composition containing a photocurable component through the mask pattern The step of forming a cured resin layer corresponding to the drawing is repeated to form a three-dimensional article composed of multiple cured resin layers. Thus, unlike the beam scanning, the curing is uniform in cross section.
申请公布号 US6780572(B1) 申请公布日期 2004.08.24
申请号 US20020049105 申请日期 2002.05.31
申请人 TOUDAI TLO, LTD. 发明人 MURAKAMI TAMOTSU;KAMIMURA AKIYA
分类号 B29C67/00;(IPC1-7):G03F7/26 主分类号 B29C67/00
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