VACUUM EXHAUST APPARATUS AND VACUUM EXHAUST METHOD FOR VACUUM EXHAUST OF VACUUM TUBE

摘要

PURPOSE: A vacuum exhaust apparatus and a vacuum exhaust method are provided to reduce process time by maintaining the main chamber at the vacuum level of 10¬-8 torr even when a plurality of vacuum tubes are continuously loaded. CONSTITUTION: A vacuum exhaust apparatus comprises a vacuum container; a main vacuum exhaust line, an auxiliary vacuum exhaust line, a vacuum tube vacuum exhaust line, and an ion gauge mount vacuum exhaust line which are coupled to the vacuum container; and an auxiliary vacuum exhaust line valve(22) arranged between the auxiliary vacuum exhaust line and the vacuum tube vacuum exhaust line, in such a manner that an ultra high vacuum state(10¬-8 torr) is maintained and a plurality of vacuum tubes are continuously loaded during continuous vacuum exhaust processes performed in the vacuum exhaust apparatus.