| 摘要 |
PURPOSE: An ultrasonic drill hone for drilling a hole in a plasma chamber cathode is provided to precisely drill holes in the plasma chamber cathode. CONSTITUTION: An ultrasonic drill hone(100) for drilling a hole in a plasma chamber cathode is composed of a coupling unit(120), hollow parts(110), and a plurality of pins(10). The coupling unit is formed at the top of the hone, and is coupled to an ultrasonic drilling machine(200). The hollow parts are formed in the hone. The pins are coupled to the bottom of the hone, and emit ultrasonic waves. |
