Electronic component for microwave frequency systems has micro-electro-mechanical trimming capacitor with control circuit to adjust capacitance as a function of the difference between measured and set values of capacitance

摘要

The component has a micro-electromechanical (MEMS) trimming capacitor with electrodes movable with respect to each other. A control circuit (30) with an AC source (32) has a device for measuring the capacitance of the capacitor, a comparator (35) for determining the difference between measured and set capacitances, and a device for injecting an electric charge in a control electrode to create an electrostatic force that moves one electrode with respect to the other and adjusts the capacitance of the capacitor.