| 摘要 |
PROBLEM TO BE SOLVED: To obtain a pattern drawing method and an apparatus whereby the error generated between the designed and finished dimensions of a pattern can be avoided or suppressed. SOLUTION: In the pattern drawing method and apparatus, when a pattern F1 is divided into first and second portions F1<SB>1</SB>. F1<SB>2</SB>by a tentative stripe boundary C12, and the width W1 of the first portion F1<SB>1</SB>is made smaller than a predetermined threshold (0.40μm), the tentative stripe boundary C12 is so shifted locally in the place of the pattern F1 being described as for the first portion F1<SB>1</SB>to belong to a tentative stripe region R2. That is, formal stripe regions R1<SB>a</SB>, R2<SB>a</SB>are so obtained by correcting a tentative stripe region R1 and the tentative stripe region R2 as for the whole of the pattern F1 to belong to the formal stripe region R2<SB>a</SB>. Then, a drawing portion 2 draws a pattern in a drawing object 6, based on a pattern data D2 wherein the formal stripe regions R1<SB>a</SB>, R2<SB>a</SB>are specified. COPYRIGHT: (C)2004,JPO&NCIPI
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