| 摘要 |
PROBLEM TO BE SOLVED: To save the labor and time required for manual prober exchanging work, to shorten the time required for stopping an inspection line for inspecting a liquid crystal substrate, and to save the space required for installing a rack used for keeping probers. SOLUTION: A liquid crystal substrate inspection device 1 is constituted to arrange an inspecting section (load lock chamber 11) which inspects the liquid crystal substrate 30 and a prober exchanger 10 which exchanges probers 6 used for inspecting the substrate 30 side by side and, at the same time, to make the prober exchanger 10 to be provide with a rack 2 used for keeping the probers 6. When the inspecting section and prober exchanger 10 are arranged side by side in this way, the inspection time of the liquid crystal substrate 30 can be shortened. In addition, when the prober exchanger 10 is used as the rack 2 for keeping the probers 6, the space required for installing the rack 2 can be saved. COPYRIGHT: (C)2004,JPO&NCIPI
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