| 摘要 |
PROBLEM TO BE SOLVED: To provide a minute displacement supporting device facilitating finely adjusting a position of a table. SOLUTION: The minute displacement supporting device has the table for supporting an article, and an alignment means for adjusting the position of the table by minute displacement of the table. The alignment means has an electrostrictive element, and a moving means for moving the electrostrictive element and shifting an expanding/contracting start point. A clamp mechanism for keeping the position of the table after being aligned is provided. COPYRIGHT: (C)2004,JPO&NCIPI
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