| 摘要 |
PROBLEM TO BE SOLVED: To ensure a sheet-fed cleaning, reduce the cost, and ensure cleaning harmless environmentally by employing as a peeling solution an aqueous oxalic acid solution at a low temperature with low concentration. SOLUTION: The cleaning method is characterised by being provided with a process (step S23) for processing a substrate with the aqueous oxalic acid solution with a concentration of 1 to 10 % at a temperature of 30 to 50°C. COPYRIGHT: (C)2004,JPO&NCIPI
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