Apparatus and methods for recirculating liquid dispensing systems

摘要

A method and apparatus for regulating backflow in a recirculation path coupling a three-way dispensing module with a liquid distribution manifold. The dispensing module and manifold are coupled together to provide a dispensing path for providing liquid from the manifold to the dispensing module for dispensing onto a substrate. A check valve positioned in the recirculation path ensures that liquid cannot flow from the recirculation path to the dispensing path as the dispensing valve of the dispensing module cycles from an open condition to a closed condition. This backflow prevention improves the accuracy of dispensed volumes of liquid.