发明名称 PLATING DEVICE AND METHOD
摘要 There is provided a plating device that can easily form a uniform plated film on the surface, to be plated, of a material. The plating device includes: a holder for holding a material with its surface, to be plated, upward and its peripheral portion of the surface, to be plated, sealed; a heated fluid holding section for holding a heated fluid which is allowed to come into contact with the back surface of the material held by the holder to heat the material; and a plating solution supply section for supplying a plating solution to the surface, to be plated, of the material held by the holder.
申请公布号 WO03014416(A3) 申请公布日期 2004.08.19
申请号 WO2002JP08213 申请日期 2002.08.12
申请人 EBARA CORPORATION;HONGO, AKIHISA;WANG, XINMING;MATSUDA, NAOKI 发明人 HONGO, AKIHISA;WANG, XINMING;MATSUDA, NAOKI
分类号 C23C18/16;H01L21/288;H01L21/768 主分类号 C23C18/16
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