| 摘要 |
PROBLEM TO BE SOLVED: To speed up the temperature rise or temperature lowering of a heat insulating cylinder provided in a vertical furnace. SOLUTION: A cooling tube 8 is provided for circulating a coolant in the heat insulating cylinder 5, and the coolant is forced to flow through the inside of the cooling tube 8 when an outer tube 2 is lowered in its temperature to forcedly cool the heat insulating cylinder 5. COPYRIGHT: (C)2004,JPO&NCIPI
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