SEMICONDUCTOR FABRICATION APPARATUS AND METHOD FOR LOADING SEMICONDUCTOR SUBSTRATE ON SUPPORTER WITHIN THE SAME

摘要

PURPOSE: A semiconductor fabrication apparatus and a method for loading a semiconductor substrate supporter within the same are provided to load a wafer on a correct position of a plate when the wafer is loaded on an incorrect position by a malfunction of a transfer arm. CONSTITUTION: A hole is formed in an inside of a supporter(100). A lift pin(180) is moved vertically within the hole of the supporter in order to load the semiconductor substrate on the supporter and unload the semiconductor substrate from the supporter. A wafer guide(200) is located at an edge of the supporter in order to guide the semiconductor substrate to the predetermined position of the supporter and prevent the movement of the semiconductor substrate loaded on the predetermined position of the supporter. The supporter is formed with a circular plate(120) and a spacer(140) for supporting the semiconductor substrate.