PIEZOELECTRIC ELEMENT, INK JET HEAD, ANGULAR VELOCITY SENSOR, AND THEIR MANUFACTURING METHODS, AND INK JET TYPE RECORDING APPARATUS

摘要

PROBLEM TO BE SOLVED: To reduce the characteristic dispersion of a piezoelectric element and to improve voltage resistance and reliability by forming a piezoelectric layer composed of a perovskite oxide with excellent crystallinity and (001) surface crystal orientation in the piezoelectric element.

SOLUTION: A first electrode layer 14 composed of a noble metal added with at least one kind of additive selected out of Mg, Ca, Sr, Ba, Al and a group of oxides thereof is provided on a substrate 11, an orientation control layer 15 composed of the perovskite oxide preferentially oriented on a (100) or (001) surface of a cubic or tetragonal system, and a piezoelectric layer 16 composed of the provskite oxide preferentially oriented on the (001) surface of a diamond-shaped or tetragonal system is provided on the orientation control layer 15.

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