CONTACT FORMING MASK AND CONTACT FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a contact forming mask and a contact process for forming a good contact without changing a manufacturing process .

SOLUTION: The contact mask 202 has a contact pattern 208. The contact pattern 208 has an exposure region. In order to obtain a halftone effect at the edge of the contact pattern 208, the edge of the contact pattern 208 is so designed as to include a series of saw teeth. The saw teeth creating the contour of the edge are saw teeth 206a of a sharp point.

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