| 摘要 |
A device is provided for spatially resolved measurement of the thickness of a layer located on a sample carrier (7), said device comprising a light source (1-3) emitting polychromatic radiation with a predetermined spectral composition, illumination optics (4-6) illuminating the sample carrier (7) with radiation from the light source (1-3), detector optics (6, 5, 8) picking up radiation reflected by a line-shaped portion of the sample carrier (7) and guiding said radiation to a polychromator (9, 11) as a line-shaped beam, said polychromator (9, 11) separating the line-shaped beam into a field-shaped spectrum, and a camera (12), which receives the field-shaped spectrum, the polychromator (9, 11) being tuned to the spectral composition of the radiation from the light source.
|
