| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card on which probes can be formed at a high density and, at the same time, a decoupling capacitor used for cutting high-frequency noise is disposed near by the probes. SOLUTION: The probe card which is used for testing the electrical characteristics of an electronic circuit by bringing the probes into contact with the electrodes of a semiconductor wafer or chip to be inspected contains a first wiring board and a second wiring board mounted of the first wiring board, so as to form a gap between the first and second wiring boards. The probes are provided on the second wiring board, and at least the decoupling capacitor is mounted on the second wiring board in the gap on the opposite side of the probe attaching surface of the second wiring board. COPYRIGHT: (C)2004,JPO&NCIPI
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