Substratbehälter mit Eckenhalterung

摘要

A cassette or box(10) for containing and holding a planar substrate such as a reticle having a clamp bar(14) coupled to corner supports(20, 34) by a spring or flexure(16) and a linkage (28, 30, 32). The clamp bar(10) is pivotally attached to bottom corner supports(20) and a spring or flexure(16) and linked to a top corner support(34), such that movement of the clamp bar(14) causes the corner supports(20, 34) to pivot away from a reticle being held only at the corners. An elevation bar(38) is also used to preposition the reticle in one direction. The present invention greatly facilitates the positioning and handling of a reticle as used in photolithography to manufacture semiconductor devices. Additionally, the present invention greatly reduces particulate contamination.