APPARATUS, METHOD, AND SYSTEM FOR ULTRASONIC WASHING

摘要

PROBLEM TO BE SOLVED: To efficiently and securely perform ultrasonic washing of various objects to be washed even with a relatively small-sized vibrator. SOLUTION: A washing tank 100 and a vibrator 101 are provided. The vibrator is installed on the side of the bottom surface of the washing tank 100 and vibrates washing liquid 150, and the vibrator 101 is moved on the bottom surface 110 of the washing tank 100. Further, a vibrator is provided above an object to be washed which is dipped in the washing liquid 150 and vibrates the washing liquid 150. Consequently, uneven washing is prevented from being generated between the upper part and lower part of the object to be washed. COPYRIGHT: (C)2004,JPO&NCIPI