| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing at low costs and in short time, a perpendicular magnetic recording medium of high recording density in which crash trouble due to impact etc. at load/unload (LUL) time does not easily occur. SOLUTION: A non-magnetic disk substrate 1 made of glass disk and having a smooth surface is installed in a sputter device and a soft magnetic layer 2 of CoTaZr is formed by a DC magnetron sputtering method under a Krypton and/or xenon atmosphere, then under an argon atmosphere, a non-magnetic underlayer 3 of Ti, a perpendicular magnetic recording layer 4 of CoCrPt, and a protective layer 5 of hydrogenated carbon are deposited and formed films one by one. Finally, a lubrication layer 6 of perfluoro polyether is formed by the dip coating method, and the perpendicular magnetic recording medium is manufactured. COPYRIGHT: (C)2004,JPO&NCIPI
|
