| 摘要 |
This invention deals with novel method and apparatus for positioning and motion control by rapid-response motorless linear motion, angular deflection, and continuous rotational motion utilizing the force due to electrons, ions, and/or neutrals. Thus forces and torques are produced without the use of internal moving parts. Control is achieved without recourse to magnetic fields, by means of high electric fields which may be attained at relatively low voltages. At low voltages, the instant invention exceeds the capability of conventional systems. It can perform dynamic motion control over a wide range of dimensions and signal bandwidth with independent amplitude and frequency modulation. Since there are no internal moving parts, the instant invention is the most adapted for fabrication at the micro and nanotechnology realms. Furthermore it provides less costly and greater ease of manufacture from the nano-to the macro-realm.
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