发明名称 High density 3d rail stack arrays and method of making
摘要 A semiconductor device comprises two transistors where a gate electrode of one transistor and source or drain of another transistor are located in the same rail. A monolithic three dimensional array contains a plurality of such devices. The transistors in different levels of the array preferably have a different orientation.
申请公布号 US2004159860(A1) 申请公布日期 2004.08.19
申请号 US20040779760 申请日期 2004.02.18
申请人 MATRIX SEMICONDUCTOR, INC. 发明人 PATEL KEDAR;ILKBAHAR ALPER;SCHEUERLEIN ROY;WALKER ANDREW J.
分类号 H01L21/8239;H01L27/088;H01L27/092;H01L27/105;(IPC1-7):H01L29/76 主分类号 H01L21/8239
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