发明名称 |
High density 3d rail stack arrays and method of making |
摘要 |
A semiconductor device comprises two transistors where a gate electrode of one transistor and source or drain of another transistor are located in the same rail. A monolithic three dimensional array contains a plurality of such devices. The transistors in different levels of the array preferably have a different orientation. |
申请公布号 |
US2004159860(A1) |
申请公布日期 |
2004.08.19 |
申请号 |
US20040779760 |
申请日期 |
2004.02.18 |
申请人 |
MATRIX SEMICONDUCTOR, INC. |
发明人 |
PATEL KEDAR;ILKBAHAR ALPER;SCHEUERLEIN ROY;WALKER ANDREW J. |
分类号 |
H01L21/8239;H01L27/088;H01L27/092;H01L27/105;(IPC1-7):H01L29/76 |
主分类号 |
H01L21/8239 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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