PURPOSE: A wafer holder is provided to enhance the productivity by reducing damage and scratches of a wafer in a process for fixing the wafer to a wafer holder. CONSTITUTION: A plurality of pads(130) are arranged on the surface of a plate(110) in order to support a wafer. A plurality of guide pins are installed at a predetermined position on the plate opposite to a lateral part of the wafer. The guide pins are used for aligning the wafer supported on the pads at a predetermined loading point. The guide pins are located vertically to the plate. One of the guide pins is inserted into a notch(142), which is formed on the lateral part of the wafer by moving the wafer. Each external part of the guide pins is formed with plastics.
