| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid crystal display capable of forming a thin film of a transparent electrode while preventing the occurrence of a crack at the peripheral part of a contact hole. SOLUTION: The manufacturing method of the liquid crystal display includes a step for forming the contact hole 5 facing a lower electrode 3 for connecting with a TFT (thin film transistor) 2 on a substrate 1 in an interlayer insulating layer 4, a step for film-depositing a transparent electrode 6 of the first layer on the contact hole, a step for removing the transparent electrode 6 of the first layer except the transparent electrode 6 at the inner part and the peripheral part of the contact hole 5 and a step for film-depositing thereon a transparent electrode 7 of the second layer having the material identical with that of the first transparent electrode 6. The occurrence of a crack at the peripheral part of the contact hole 5 is prevented, since the thickness obtained by adding the thickness of the transparent electrode 6 of the first layer to the thickness of the transparent electrode 7 of the second layer can be secured at the peripheral part of the contact hole 5 in the interlayer insulating film 4. COPYRIGHT: (C)2004,JPO&NCIPI |
