| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an SiC substrate with a graphite structured body which has a new constitution, a method of manufacturing the SiC substrate with the graphite structured body and a method of manufacturing the graphite structured body. <P>SOLUTION: An edge extending in-plane is formed on the main surface of the SiC substrate 1 having an Si face as the main surface. The main surface of the SiC substrate 1 is heat treated under vacuum to form a linear graphite structured body 10 on the main surface of the SiC substrate, the linear graphite structured body 10 being oriented in the direction along the main surface. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
