发明名称 Semiconductor device
摘要 Disclosed is a semiconductor device comprising an insulating film, a capacitor formed on the insulating film and comprising a bottom electrode, a top electrode, and a dielectric film between the top electrode and the bottom electrode, a plug passing through the insulating film and connected to the bottom electrode, and an oxygen barrier film covering the capacitor and the insulating film, and having lower oxygen permeability than the insulating film.
申请公布号 US2004159874(A1) 申请公布日期 2004.08.19
申请号 US20030635574 申请日期 2003.08.07
申请人 TSUCHIYA TAKAMICHI;YABUKI MOTO 发明人 TSUCHIYA TAKAMICHI;YABUKI MOTO
分类号 H01L27/105;H01L21/02;H01L21/8246;H01L27/115;(IPC1-7):H01L29/76;H01L21/824 主分类号 H01L27/105
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