摘要 |
PROBLEM TO BE SOLVED: To provide a polybenzoxazole film having highly balanced mechanical properties in longitudinal and lateral directions, excellent thickness uniformity and high strength, elastic modulus and heat-resistance. SOLUTION: The polybenzoxazole film is produced by using a solution of a polyimide having a phenylene group having a substituted or unsubstituted OH group at the ortho site of the imide group, casting the solution on a substrate in the form of a film and heat-treating the film to form an oxazole ring. COPYRIGHT: (C)2004,JPO&NCIPI |