| 摘要 |
PROBLEM TO BE SOLVED: To provide a pad-coating system that can check the status of a UV source portion and a dispenser to interrupt the pad coating operation, and to provide its interlock method. SOLUTION: The present pad coating system has the UV source portion 42 that is for irradiation with a UV, based on UV irradiation conditions set at the time of a pad coating operation, after the UV irradiation condition is set in response to a UV source open/close signal, and outputs a first signal indicating the status of a first control switch, a dispenser 44 that injects a coating liquid, based on a coating condition set at the time of a pad coating operation to output a second signal indicating the status of a second control switch, and a prober section 30 having a controlling section that generates a UV source shutter open/close signal SOC and a coating condition designation signal ADD, to control the pad coating operation and interrupt the pad-coating operation, in response to the first and second signals. COPYRIGHT: (C)2004,JPO&NCIPI
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