发明名称 OPTICAL DEVICE AND REVERSE DISPERSION TYPE DOUBLE SPECTROMETER
摘要 PROBLEM TO BE SOLVED: To provide an optical device and a reverse dispersion type double spectrometer which can monitor light, without losing light intensity on a light path. SOLUTION: The device comprises an input means 11 which emits an input light, consisting of plural wavelength regions into a free space; a collimating means 12 which collimates the input light and emits a parallel light L1; a wavelength dispersion means 13 which generates a first diffracted light L7 for use in an output, by giving at least once wavelength dispersion action to the parallel light; output means 18, 19 which output the first diffracted light and which are located at an extension of an output light path, starting from the parallel light L1 to the generation of the first diffracted light L7; monitoring means 20, 21 which monitor a spectral information on a second diffracted light L8, generated in the directions deviating from the output light path, among the diffracted lights generated by each wavelength dispersion action. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004233341(A) 申请公布日期 2004.08.19
申请号 JP20030434674 申请日期 2003.12.26
申请人 NIKON CORP 发明人 KATSUNUMA ATSUSHI
分类号 G01J3/18;G01J3/36;G02B5/18;(IPC1-7):G01J3/18 主分类号 G01J3/18
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